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Nanofabrication techniquesMAILLY, D.The European physical journal. Special topics. 2009, Vol 172, pp 333-342, issn 1951-6355, 10 p.Article

Process control and material properties of thin electroless Co- based capping layers for copper interconnectsPETROV, Nicolai; VALVERDE, Charles; QINGYUN CHEN et al.Proceedings of SPIE, the International Society for Optical Engineering. 2005, pp 60020O.1-60020O.13, issn 0277-786X, isbn 0-8194-6026-5, 1VolConference Paper

Self-Powered Integrated Systems-on-Chip (Energy Chip)HUSSAIN, M. M; FAHAD, H; ROJAS, J et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7679, issn 0277-786X, isbn 978-0-8194-8143-6, 767914.1-767914.7Conference Paper

Measurement Traceability and Quality Assurance in a Nanomanufacturing EnvironmentORJI, Ndubuisi G; DIXSON, Ronald G; CORDES, Aaron et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7405, issn 0277-786X, isbn 978-0-8194-7695-1 0-8194-7695-1, 1Vol, 740505.1-740505.10Conference Paper

Advanced fabrication technologies for micro/nano optics and photonics (21-23 January 2008, San Jose, California, USA)Suleski, Thomas J; Schoenfeld, Winston V; Wang, Jian Jim et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, issn 0277-786X, isbn 978-0-8194-7058-4, 1 v. (various pagings), isbn 978-0-8194-7058-4Conference Proceedings

Plasmonics (nanoimaging, nanofabrication, and their applications III)Kawata, Satoshi; Shalaev, Vladimir M; Tsai, Din P et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, issn 0277-786X, isbn 978-0-8194-6790-4, 1 v. (various pagings), isbn 978-0-8194-6790-4Conference Proceedings

Plasmonic nanorectennas for energy conversionOSGOOD, Richard; CARLSON, Joel B; KIMBALL, Brian R et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7394, issn 0277-786X, isbn 978-0-8194-7684-5 0-8194-7684-6, 1Vol, 73941L.1-73941L.11Conference Paper

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Nanoscale dimensional metrology in RussiaGAVRILENKO, V. P; NOVIKOV, Yu. A; RAKOV, A. V et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7405, issn 0277-786X, isbn 978-0-8194-7695-1 0-8194-7695-1, 1Vol, 740504.1-740504.8Conference Paper

Dynamic generation of Debye diffraction-limited multifocal arrays for direct laser printing nanofabricationHAN LIN; BAOHUA JIA; MIN GU et al.Optics letters. 2011, Vol 36, Num 3, pp 406-408, issn 0146-9592, 3 p.Article

Engineering the plasmon resonance of large area bimetallic nanoparticle films by laser nanostructuring for chemical sensorsBELIATIS, Michail J; HENLEY, Simon J; SILVA, S. Ravi P et al.Optics letters. 2011, Vol 36, Num 8, pp 1362-1364, issn 0146-9592, 3 p.Article

Electron Vortex Beams with High Quanta of Orbital Angular MomentumMCMORRAN, Benjamin J; AGRAWAL, Amit; ANDERSON, Ian M et al.Science (Washington, D.C.). 2011, Vol 331, Num 6014, pp 192-195, issn 0036-8075, 4 p.Article

Nanoimprint lithography : Review of aspects and applicationsWAGNER, D. J; JAYATISSA, A. H.Proceedings of SPIE, the International Society for Optical Engineering. 2005, pp 60020R.1-60020R.9, issn 0277-786X, isbn 0-8194-6026-5, 1VolConference Paper

New routes for imaging the optical near-fields of plasmonic nanostructuresWIEDERRECHT, Gary P; BOUHELIER, Alexandre; HALL, Jeffrey E et al.Proceedings of SPIE, the International Society for Optical Engineering. 2005, pp 60020T.1-60020T.9, issn 0277-786X, isbn 0-8194-6026-5, 1VolConference Paper

Structural colour printing using a magnetically tunable and lithographically fixable photonic crystalKIM, Hyoki; JIANPING GE; KIM, Junhoi et al.Nature photonics (Print). 2009, Vol 3, Num 9, pp 534-540, issn 1749-4885, 7 p.Article

Measurement of thickness of native silicon dioxide with a scanning electron microscopeGAVRILENKO, V. P; NOVIKOV, Yu. A; RAKOV, A. V et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7405, issn 0277-786X, isbn 978-0-8194-7695-1 0-8194-7695-1, 1Vol, 740507.1-740507.8Conference Paper

Instrumentation, metrology, and standards for nanomanufacturing II (10 August 2008, San Diego, California, USA)Postek, Michael T; Allgair, John Alexander.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7042, issn 0277-786X, isbn 978-0-8194-7262-5 0-8194-7262-X, 1Vol, various pagings, isbn 978-0-8194-7262-5 0-8194-7262-XConference Proceedings

Advances in roll to roll processing of opticsWATTS, Michael P. C.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 688305.1-688305.11, issn 0277-786X, isbn 978-0-8194-7058-4Conference Paper

Special issue on fundamental aspects of nanophotonicsZHELUDEV, Nikolay; STOCKMAN, Mark; ZAYATS, Anatoly et al.Journal of optics. A, Pure and applied optics (Print). 2006, Vol 8, Num 4, issn 1464-4258, 296 p.Serial Issue

Low-k/copper integration scheme suitable for ULSI manufacturing from 90nm to 45nm nodesNOGAMI, T; LANE, S; DZIOBKOWSKI, C et al.Proceedings of SPIE, the International Society for Optical Engineering. 2005, pp 60020L.1-60020L.15, issn 0277-786X, isbn 0-8194-6026-5, 1VolConference Paper

Improved diffraction-based overlay metrology by use of two dimensional array targetKU, Yi-Sha; PANG, Hsiu-Lan; HSU, Weite et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7405, issn 0277-786X, isbn 978-0-8194-7695-1 0-8194-7695-1, 1Vol, 74050C.1-74050C.9Conference Paper

Optomechatronic micro/nano devices and components II (3-4 October, 2006, Boston, Massachusetts)Katagiri, Yoshitada.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6474-0, 1Vol, various pagings, isbn 0-8194-6474-0Conference Proceedings

Enabling nanoscale science and engineering via highly flexible, low-cost, maskless lithographySMITH, Henry I; MENON, Rajesh; PATEL, Amil et al.Proceedings of SPIE, the International Society for Optical Engineering. 2005, pp 60020B.1-60020B.8, issn 0277-786X, isbn 0-8194-6026-5, 1VolConference Paper

Challenges and Opportunities in NanomanufacturingCOOPER, Khershed P; WACHTER, Ralph F.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 8105, issn 0277-786X, isbn 978-0-8194-8715-5, 810503.1-810503.6Conference Paper